Last Update: 05/Jul/2022

【衝突輻射モデルを応用した、非平衡プラズマの電子温度・密度の分光計測法の開発】

 -  Yuya Yamashita, Takuya Akiba, Toshihide Iwanaga, Shuichi Date, Hidehiko Yamaoka, Hiroshi Akatsuka,
Optical Emission Spectroscopic Measurement of Argon Low-Pressure Inductively Coupled Plasma Based on the Optimization Algorithm of Plasma Diagnostic Model,
IEEE Transactions on Plasma Science,
Vol. 50, No. 6, 1875 - 1889 (2022).

 -  H. Horita, D. Kuwahara, H. Akatsuka, S. Shinohara,
Estimating electron temperature and density using improved collisional-radiative model in high-density RF argon plasma,
AIP Advances,
Vol. 11, No. 7, 075226 (2021).

 -  Yuya Yamashita, Takuya Akiba, Toshihide Iwanaga, Hidehiko Yamaoka, Shuichi Date, Hiroshi Akatsuka,
Developing an optimization algorithm for diagnostic modeling of optical emission spectroscopic measurement of non-equilibrium plasmas based on the argon collisional-radiative model,
Jpn. J. Appl. Phys.,
Vol. 60, No. 4, 0460032021 (2021).

 -  Hiroshi Akatsuka,
Optical Emission Spectroscopic (OES) analysis for diagnostics of electron density and temperature in non-equilibrium argon plasma based on collisional-radiative model,
Adv. Phys. X,
Vol. 4, No. 1, 1592707 (2019).

 -  Yuya Yamashita, Fuminori Yamazaki, Atsushi Nezu, Hiroshi Akatsuka,
Diagnostics of low-pressure discharge argon plasma by multi-optical emission line analysis based on the collisional-radiative model,
Jpn. J. Appl. Phys.,
Vol. 58, No. 1, 016004 (2019).

 -  赤塚洋,
高圧力非平衡プラズマ中電子密度・温度算出のための発光スペクトル解析,
応用物理,
Vol. 87, No. 11, pp. 821 - 827 (2018).

 -  S. Waseda, H. Fujitsuka, S. Shinohara, D. Kuwahara, M. Sakata and H. Akatsuka,
Optical Measurements of High-Density Helicon Plasma by Using a High-Speed Camera and Monochromators,
Plasma Fus. Res.,
Vol. 9, [Special Issue 2], 3406125 (4 pages) (2014).

 -  赤塚洋,
発光分光計測を用いたプロセスプラズマの診断,
電気学会論文誌A 基礎・材料・共通部門誌,
社団法人 電気学会, Vol. 130, No. 10, pp. 892-898, Oct. 2010.

 -  赤塚洋,
基礎講座 放電プラズマの分光計測(第1回)発光分光法,
放電研究, 放電学会, Vol. 48, No. 3, pp. 19-25, Nov. 2005.

 -  K. Kano and H. Akatsuka,
Spectroscopic Measurement of Electron Temperature and Density in Argon Plasmas Based on Collisional-Radiative Model,
Ch. 3, Advances in Plasma Physics Research Vol. 3, Nova Science Publishers, New York, Nova Science Publishers, New York, pp. 55-85, 2002.

 -  K. Kano, M. Suzuki and H. Akatsuka,
Spectroscopic Measurement of Electron Temperature and Density in an Argon Plasma Jet Based on Collisional-Radiative Model,
Contrib. Plasma Phys., Vol. 41, No. 1, pp. 91, 2001.

 -  K. Kano, M. Suzuki and H. Akatsuka,
Spectroscopic Measurement of Electron Temperature and Density in Argon Plasmas Based on Collisional-Radiative Model,
Plasma Sources Sci. Technol., Vol. 9, pp. 314, 2000.